Wavelength 10.6 µm or 9.3 µm
- Very powerful excimerlaser
- Low jitter
- Low pulse to pulse instability
- Long gas service time
- Long durability of optics
- Corona free ionization
- Integrated vacuum pump
| Model | EX 5 CO² | EX 10A CO² | EX 10 CO² | EX 100 CO² | EX 350 CO² |
|---|---|---|---|---|---|
|
Pulse Energy [mJ] TEMoo |
20 |
25 |
40 |
100 |
150 |
|
Pulse Energy [mj] Multimode |
20 |
25 |
75 |
400 |
1000 |
|
Repetition Rate [Hz] |
200/400 |
250/500 |
100 |
60 |
10 |
|
Average Power [W] |
3/6 |
5/10 |
5 |
20 |
9 |
|
Pulse Width [ns] |
100 |
120 |
-- |
||
|
Beam Diameter [mm] |
3 |
4 |
-- |
||
